Symposium (Oral)

[17a-A402-1~10] 【Open Symposium】World Stops When Japan Stops! ~ Our Legendary Semiconductor Technologies ~

Fri. Mar 17, 2023 9:30 AM - 12:05 PM A402 (Building No. 6)

Emi Tamechika(Yokohama Natl. Univ.)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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9:30 AM - 9:35 AM

[17a-A402-1] Introduction

〇Tetsuya Tatsumi^1,2,3 (1.JSAP, 2.Sony, 3.Tokyo Tech.)

9:35 AM - 10:15 AM

[17a-A402-2] Semiconductor, connecting hearts and minds in our society

〇Yoshihiro Hayashi¹ (1.Keio Univ.)

10:15 AM - 10:30 AM

[17a-A402-3] The history and future of lithography development told by a legend

〇Tatsuhiko Higashiki¹ (1.KIOXIA)

10:30 AM - 10:45 AM

[17a-A402-4] Microwave ECR etching equipment system development and the real pleasure of it.

〇Akira Kagoshima¹ (1.Hitachi High-Tech)

10:45 AM - 11:00 AM

[17a-A402-5] Nothing is impossible! Yes, you can!
Let's create silicon map for the next 10 years together!

〇Pohling Then¹ (1.SCREEN Semicon.)

11:00 AM - 11:15 AM

[17a-A402-6] Precision optical technology for lithography equipment

〇Kosuke Urushihara¹ (1.Canon)

11:15 AM - 11:30 AM

[17a-A402-7] Through the development of "measurement technology" necessary for semiconductors

〇Takehiro Kumakura¹ (1.HORIBA STEC)

11:30 AM - 11:45 AM

[17a-A402-8] Predicting deposition by calculation - Multi-scale simulation -

〇Yunosuke Sakai¹ (1.KOKUSAI ELECTRIC Corp.)

11:45 AM - 12:00 PM

[17a-A402-9] The next generation of 3D-stacked devices: From the fundamental research to the mass-production of Cu-Cu hybrid bonding

〇Yoshihisa Kagawa¹ (1.Sony Semiconductor Solutions)

12:00 PM - 12:05 PM

[17a-A402-10] Closing Address

〇Kiyoshi Watanabe¹ (1.SEAJ)

Sessions

Symposium » 【Open Symposium】World Stops When Japan Stops! ~ Our Legendary Semiconductor Technologies ~