[1Ap01-15] 表面分析研究部会「最近の表面分析いろいろ」

[1Ap09] Current status and issues of peak separation and analysis in XPS Datasets

*yoshitomo harada¹, masatomo sumiya¹, hiroshi shinotsuka¹, hiroaki tosaka¹, hideki yoshikawa¹, shigeo tanuma¹ (1. National Institute for Materials Science)

For the analysis of XPS spectra dataset with many spectra, such as the initial oxidation process of GaN, which is registered in the Research Data Express (RDE) dataset of NIMS-DPFC. We attempted to perform automatic peak analysis of XPS spectra in the dataset. We have tried to analyze the spectra in two different ways, including Bayesian information criterion (BIC) analysis, and principal component analysis (PCA), and target factor analysis (TFA). From the results of these analyses, we report the oxidation trends of GaN, each surface, and each gas species.