2021年日本表面真空学会学術講演会

Presentation information

Vacuum Science Technology(VST)

[1Ea01-05] VST

Wed. Nov 3, 2021 9:00 AM - 10:15 AM Room E (Naoshima)

Chair:Junichiro Kamiya(Japan Atomic Energy Agency)

9:30 AM - 10:00 AM

[1Ea03] Development of optical pressure standard
-evaluating pressure from refractive index and temperature-

*Yoshinori Takei1, Hajime Yoshida1, Souichi Telada1, Youichi Bitou1, Tokihiko Kobata1 (1. National Institute of Advanced Industrial Science and Technology (AIST))

An optical pressure standard is being developed to make it one of the national pressure standards in future. The refractive index of gas was precisely measured using Fabry-Perot resonators and lasers. The temperature was stabilized using constant temperature water and precisely measured using thermistors. As the result of comparing the developed optical pressure standard with high-precision vacuum gauges calibrated with the conventional national pressure standards, the measurement results agreed within the uncertainties. In future, the measurement accuracy of the optical pressure standard will be further improved, so that it is will be established as a pressure standard.