2021年日本表面真空学会学術講演会

Presentation information

Vacuum Science Technology(VST)

[1Ea01-05] VST

Wed. Nov 3, 2021 9:00 AM - 10:15 AM Room E (Naoshima)

Chair:Junichiro Kamiya(Japan Atomic Energy Agency)

10:00 AM - 10:15 AM

[1Ea05] Multiphysics simulations of rarefied gas flows using DSMC with quasi-Nanbu scheme

*Kazuki Denpoh1 (1. Tokyo Electron Technology Solutions Ltd.)

In the previous papers, we developed a new intermolecular collision method, quasi-Nanbu scheme, and created the first DSMC on COMSOL Multiphysics(R). In addition to monatomic molecules, we extended the scheme to diatomic molecules and gas mixtures. In the meeting, we will demonstrate, as examples of multiphysics simulation using the DSMC, a conjugate heat transfer simulation and a coupled DSMC/test-particle simulation.