[1Ep08-13] VST

[1Ep10] Quantification of ESD measurements using standard conductance elements

*Naoya Miyauchi¹, Taro Yakabe¹, Masahiro Kitajima¹, Hajime Yoshida², Akiko N Itakura¹ (1. National Institute for Materials Science, 2. National Institute of Advanced Industrial Science and Technology)

Our purpose is to measure quantitatively the hydrogen permeation through membrane sample, using electron stimulated desorption (ESD). It was investigated that the relationship between the ion signal of ESD, a current of hydrogen molecules by a quadrupole mass spectrometer (QMS) with the hydrogen supply pressure. The sample was a standard conductance element (SCE). After removing the signals caused by QMS and ion pump as the background, the hydrogen ion signal was in a proportional relationship with supply pressure, in the range of 100 to 2000 Pa.