[3Ba01-12] スパッタリングおよびプラズマプロセス技術部会「スパッタ・プラズマで切り拓くナノ構造の世界」

[3Ba01] Nanocluster functional materials with pulsed magnetron sputtering method

*Atsushi Nakajima¹, Naoyuki Hirata², Masahide Tona², Keizo Tsukamoto² (1. Keio Uniersity, 2. Ayabo Corporation)

Nanoclusters (NCs) consisting of several to several hundred atoms have attracted attention as functional material units, and it is desirable to precisely immobilize NCs on a substrate for the applications of catalysts, electromagnetic and optical nanomaterials. In this research, NCs of a single component of platinum or silver or a composite component of metal-silicon are generated in ion currents of a nA order using a high-power impulse magnetron sputtering method, and they are fabricated to electrocatalysts, optical and electromagnetic functional nanomaterials.