[3Ba01-12] スパッタリングおよびプラズマプロセス技術部会「スパッタ・プラズマで切り拓くナノ構造の世界」

[3Ba07] Fabrication of nanocrystals of ferroelectric memory materials by improved sputtering

*Takashi Nishida¹, Kyomi Matsuzawa¹, Naoya Ohga¹, Junnosuke Ono¹, Hibiki Tanaka¹, Chikara Watanabe¹, Mizuki Inoue¹ (1. Faculty of Engineering, Fukuoka University)

In order to realize of ferroelectric memory, high quality nanocrystals of ferroelectric materials are required.
In this study, growth of ferroelectric PbTiO3 nanocrystals was investigated with our improved sputtering method.
The nanocrystals obtained on atomically flat surface of sapphire substrate had highly homogeneity and orientation, and were aligned linearly on step edge of the atomically surface.
It was revealed that high crystalline quality ferroelectric nanocrystals were fabricated by the improved sputtering, and growth position of the nanocrystals can also be controlled.