2021年日本表面真空学会学術講演会

Presentation information

Poster (core time)

[3P01-27] Poster

Fri. Nov 5, 2021 1:30 PM - 3:30 PM P会場 (P会場)

座長
13:30-14:30 一ノ倉聖(東工大)
14:30-15:30 土師将裕(東大)

[3P20] Measurement of electromagnetic field using scanning electron microscope with gratings

*Ken Harada1, Keiko Sihmada1, Yoshio Takahashi2 (1. RIKEN, 2. Hitachi, Ltd.)

The spatial electromagnetic field was measured by using a scanning electron microscope (SEM).