2021年日本表面真空学会学術講演会

Presentation information

Poster (core time)

[3P01-27] Poster

Fri. Nov 5, 2021 1:30 PM - 3:30 PM P会場 (P会場)

座長
13:30-14:30 一ノ倉聖(東工大)
14:30-15:30 土師将裕(東大)

[3P24] Study of sensitivity factor of Bayard-Alpert gauge with discrete electrode simulation model

*Shigemi Suginuma1 (1. National Institute of Industrial Science and Technology )

The sensitivity factor of the B-A gauge was examined using a simulation model assuming discrete grid electrodes, and compared with the literature values. Although it is a two-dimensional model, the dependence of the sensitivity factor of each B-A gauge on the envelope diameter was explained.