[E4-PR14] Slot 14

[E4-PR14-02] Triboelectric Nanogenerator with Random Nano-Microstructures Fabricated by Metal-PDMS Composites and Plasma Etching at Contact Interface

*Kosuke Yanagita¹, Yuki Sorimachi¹, Hiroaki Honma², Gen Hashiguchi³, Hiroshi Toshiyoshi², Takaaki Suzuki¹ (1. Gunma Univ. (Japan), 2. The Univ. of Tokyo (Japan), 3. Shizuoka Univ. (Japan))

キーワード：Triboelectric Nanogenerator, Energy Harvesting, MEMS, Plasma etching, Composite