[F4-O7] Slot 07

[F4-O7-06] SiC microphone as sensor for gas leak detection in harsh environment

*Azrul Azlan Hamzah¹, Siti Aisyah Zawawi¹, Faisal Mohd-Yasin², Burhanuddin Yeop Majlis¹ (1. Universiti Kebangsaan Malaysia (Malaysia), 2. Griffith University (Australia))

キーワード：Silicon carbide, Microphone, Gas leak detection, Harsh environment, MEMS, High temperature