Materials Research Meeting 2021

講演情報

Poster Session

H. Innovative Materials Processing for Sustainable Society » [H-2] Plasma-Based Synthesis, Processing and Characterization of Materials for Energy and Environment

[H2-PR18] Slot 18

2021年12月16日(木) 18:30 〜 20:30 H2-PR18 (G403-404)

18:30 〜 20:30

[H2-PR18-08] Ion Energy Distribution Function in DC Pulse biased Capacitively Coupled Plasma Discharge by using Particle-In-Cell/Monte Carlo Collision Model

*Kohei Abe1, Akihiro Yamamoto1, Iori Nagao1, Michihiro Otaka1, Daisuke Yamashita1, Kunihiro Kamataki1, Takamasa Okumura1, Naho Itagaki1, Kazunori Koga1,2, Masaharu Shiratani1 (1. Graduate School of Information Science and Electrical Engineering, Kyushu University. (Japan), 2. National Institutes of Natural Sciences (Japan))

キーワード:Plasma CVD, CCP, Simulation, PIC/MCC, IEDF

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