[H2-PR18] Slot 18

[H2-PR18-21] Size and density control of Fe catalyst particles by interval sputtering method for the growth control of CNT forests

*Hirofumi Koji^1,2, Hiroshi Furuta¹, Akimitsu Hatta¹ (1. Kochi Univ. Tech. (Japan), 2. National Inst. Tech., Kitakyushu College (Japan))

キーワード：Interval Sputtering, Catalyst Particle Size Control, High Density, Carbon Nanotubes, CNT forest