[H4-O7] Slot 07

[H4-O7-06] Estimation of the device characteristics of low temperature polycrystalline silicon thin film transistors through deep learning

*Takayuki Kurashige¹, Takahiro nagano¹, Keita Katayama¹, Akira Mizutani², Daisuke Nakamura¹, Tetsuya Goto³, Hiroshi Ikenoue^1,2 (1. Kyushu Univ. (Japan), 2. Department of Gigaphoton Next GLP, Kyushu Univ. (Japan), 3. New Industry Creation Hatchery Center, Tohoku Univ. (Japan))

キーワード：Low-temperature poly-Si, Thin-film transistor, Excimer laser annealing, Deep learning