[H5-PR17] Slot 17

[H5-PR17-03] Surface Condition of Titanium Thin Film Formed on Plastic Substrate by DC magnetron Spattering Method

*Akira Watazu¹, Yoshihiro Nishimura², Kay Teraoka¹, Masanobu Tobe², Tsutomu Sonoda¹ (1. National Institute of Advanced Industrial Science and Technology (AIST) (Japan), 2. Lasertec Corporation (Japan))

キーワード：Spattering, thin film, titanium