5:50 PM - 6:10 PM
[FMC7/AIS9-3] Development of Highly Heat-Resistant, Dry-Etchable Blackening Film for TFT Wiring
LTPS-TFT, Low reflectivity, Blackening, heat-resistance, dry-etch
We developed blackening material to enhance the heat resistance targeting to LTPS TFTs wiring. Moreover, we investigated the influence of deposition conditions for film properties. Lastly, we also discussed properties of TFT when the blackening material applied to not only the gate electrode but also source/drain electrode.