3:30 PM - 3:50 PM
[INP2-3(Invited)] Haptic MEMS
MEMS, Piezoelectric, Haptics
We have developed a novel “Haptic MEMS” devices, in which ultra-thin PZT/Si actuator array is integrated on flexible substrate. The haptic MEMS can express spatial tactile sensation with the distribution of vibration stimuli. In the present study, haptic MEMS with ultra-thin PZT/Si actuator array is demonstrated.