The Japan Society of Applied Physics

14:45 〜 15:00

[A-1-04] Understanding wet annealing effect on phase transition and ferroelectric phase formation for Hf1-xZrxO2 film

〇Shigehisa Shibayama1, Jotaro Nagano1, Mitsuo Sakashita1, Osamu Nakatsuka1,2 (1. Nagoya Univ.(Japan), 2. IMaSS, Nagoya Univ.(Japan))

https://doi.org/10.7567/SSDM.2020.A-1-04