The Japan Society of Applied Physics

11:45 〜 12:00

[A-4-03] On-Wafer Electron Beam Detectors by Floating-Gate FinFET Technologies

Chih-An Yang1, 〇Jiun Shi Wang1, Jeng Burn Lin2, Jung Chrong Lin1, Chin Ya King1 (1. Inst. of Electronics Engineering, National Tsing Hua Univ., Hsinchu(Taiwan), 2. Inst. of Photonics Technologies, National Tsing Hua Univ., Hsinchu(Taiwan))

https://doi.org/10.7567/SSDM.2020.A-4-03