The Japan Society of Applied Physics

14:00 〜 14:30

[C-1-01 (Invited)] Novel low k Dielectric materials for nano device interconnect technology

〇Son Nguyen1, Hosadurga Shobha1, Thomas Haigh1, James Chen1, Joe Lee1, Takeshi Nogami1, Eric Liniger1, Stephan Cohen1, Chao-Kun Hu1, Huai Huang1, Yiping Yao1, Donald Canaperi1, Cornelius Brown Peethala1, Theo Standaert1, Griselda Bonilla1 (1. IBM Research(United States of America))

https://doi.org/10.7567/SSDM.2020.C-1-01