The Japan Society of Applied Physics

17:15 〜 17:30

[C-2-06 (Late News)] Cooling Measurement of On-Chip Inetgrated EOF Micropump Using CMOS-LSI Components

〇Yuki Okamoto1,2, Yoshio Mita2, Hiroyuki Ryoson3, Takayuki Ohba3 (1. National Institute of Advanced Industrial Science and Technology(Japan), 2. The University of Tokyo(Japan), 3. Tokyo Institute of Technology(Japan))

https://doi.org/10.7567/SSDM.2020.C-2-06