The Japan Society of Applied Physics

17:30 〜 17:45

[C-2-07 (Late News)] Study on relationship between nano particle agglomeration action and polishing characteristics in CMP

〇Mohammed Ahmed Yousof Abdelhakeem Bakier1, Keisuke Suzuki1, Panart Khajornrungruang1 (1. Kyushu Institute of Tech.(Japan))

https://doi.org/10.7567/SSDM.2020.C-2-07