The Japan Society of Applied Physics

12:15 〜 12:30

[C-4-05] Effect of Dielectric Layer Scheme for High-Quality Silicon Channel in Monolithic 3DIC

〇Yu Wei Liu1, Yi Jui Chang1, Chih Chao Yang2, Chang Hong Shen2, Kuan Neng Chen1, Chenming Hu3 (1. National Chiao Tung Univ.(Taiwan), 2. Taiwan Semiconductor Res. Inst.(Taiwan), 3. Univ. of California, Berkeley(United States of America))

https://doi.org/10.7567/SSDM.2020.C-4-05