11:30 AM - 11:45 AM

[D-4-03] Lateral spreads of Al and P atoms implanted into a high-purity semi-insulating SiC substrate

〇Qimin Jin¹, Masashi Nakajima¹, Mitsuaki Kaneko¹, Tsunenobu Kimoto¹ (1. Kyoto University(Japan))

https://doi.org/10.7567/SSDM.2020.D-4-03