The Japan Society of Applied Physics

12:00 〜 12:15

[D-4-05] Automatic Detection of Dislocation contrasts in Birefringence Image of SiC Wafers Using Variance Filter Method

Akira Kawata1, Kenta Murayama2, Shogo Sumitani1,3, 〇Shunta Harada4 (1. Kyoto University(Japan), 2. Mipox Coroporation(Japan), 3. Anamorphosis Networks(Japan), 4. Nagoya University(Japan))

https://doi.org/10.7567/SSDM.2020.D-4-05