The Japan Society of Applied Physics

15:00 〜 15:15

[F-1-04] Enlargement of Frequency Bandwidth of Vibrational MEMS Energy Harvester by High Density Electrets

〇Hiroaki Honma1, Yukiya Tohyama1, Hiroyuki Mitsuya2, Hisayuki Ashizawa2, Hiroshi Toshiyoshi1 (1. Univ. of Tokyo(Japan), 2. Saginomiya Seisakusho, Inc.(Japan))

https://doi.org/10.7567/SSDM.2020.F-1-04