The Japan Society of Applied Physics

17:30 〜 17:45

[F-10-07] Activation of Dopant Atoms in Silicon by Microwave-Induced Rapid Heating with Wireless Carbon Heating Tubes

〇Masahiko Hasumi1, Toshiyuki Sameshima1, Ryota Seki1, Takuma Uehara1, Takuji Arima1, Tomoyoshi Miyazaki1,2, Go Kobayashi3, Izumi Serizawa3 (1. Tokyo Univ. of Agri. and Tech.(Japan), 2. Techno Research., Ltd.(Japan), 3. ORC MANUFACTURING CO., LTD.(Japan))

https://doi.org/10.7567/SSDM.2020.F-10-07