The Japan Society of Applied Physics

16:30 〜 16:45

[G-10-03] The Use of a Multiple Roughening Scheme to Enhance Sensing Performance of pH Sensors with NiO Nanosheets/MWCNTs on KOH-etched Si Substrate
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〇Yi-Shiang Chang1, Shui-Jinn Wang1, Rong-Ming Ko2 (1. Inst. of Microelectronics, Dept. of Electrical Engineering, National Cheng Kung University(Taiwan), 2. College of Electrical Engineering and Computer Science, National Cheng Kung University(Taiwan))

https://doi.org/10.7567/SSDM.2020.G-10-03