The Japan Society of Applied Physics

15:00 〜 15:15

[H-1-04] Micrometer-Scale Monolayer WS2 Crystal Grown by Alkali Metal Free Gas Source Chemical Vapor Deposition with H2S and WF6 Precursors

〇Mitsuhiro Okada1, Naoya Okada1, Wen Hsin Chang1, Tetsuo Shimizu1, Toshitaka Kubo1, Masatou Ishihara1, Toshifumi Irisawa1 (1. AIST(Japan))

https://doi.org/10.7567/SSDM.2020.H-1-04