The Japan Society of Applied Physics

12:00 〜 12:15

[I-4-04] Superconducting Poly-SOI Layers by Boron Ion Implantation and UV Nanosecond Laser Annealing

〇Richard Daubriac1, Pablo Acosta Alba1, Stéphane Lequien2, Christophe Marcenat2, Tom Doekle Vethaak2, Fabrice Nemouchi1, François Lefloch2, Sébastien Kerdilès1 (1. Univ. Grenoble Alpes, CEA LETI(France), 2. Univ. Grenoble Alpes, CEA IRIG(France))

https://doi.org/10.7567/SSDM.2020.I-4-04