The Japan Society of Applied Physics

16:00 〜 16:15

[J-2-01] Effects of water and hydrogen introduction during In–Ga–Zn–O sputtering on the performance of low-temperature processed thin-film transistors

〇Yusaku Magari1,2, Mamoru Furuta1,2 (1. School of Environmental Sci. and Eng., Kochi Univ. of Tech.(Japan), 2. Center for Nanotech., Kochi Univ. of Tech.(Japan))

https://doi.org/10.7567/SSDM.2020.J-2-01