The Japan Society of Applied Physics

17:00 〜 17:15

[J-6-04] High-performance IGZO TFTs with Cu-based Multilayer Electrodes using MoAl Alloy as Buffer Layers

〇Chuan Liu1, Zhaogui Wang1, Yafang Wang1, Gongtan Li2, Shan Li2 (1. Sun Yat-Sen University(China), 2. Shenzhen China Star Optoelectronics Technology Co., Ltd(China))

https://doi.org/10.7567/SSDM.2020.J-6-04