Formation mechanism of electronegative oxygen ions generated with after-arc plasma using time-resolved probe and RF probe methods

Hisashi Kitami; Junichi Nomoto; Toshiyuki Sakemi; Hisao Makino; Yasushi Aoki; Tetsuya Yamamoto

Presentation information

Oral presentation

8 Plasma Electronics » 8.2 Plasma measurements and diagnostics

[5a-A413-1~10] 8.2 Plasma measurements and diagnostics

Tue. Sep 5, 2017 9:15 AM - 11:45 AM A413 (413)

Koichi Sasaki(Hokkaido Univ.)

10:15 AM - 10:30 AM

△ [5a-A413-5] Formation mechanism of electronegative oxygen ions generated with after-arc plasma using time-resolved probe and RF probe methods

〇Hisashi Kitami^1,2, Junichi Nomoto², Toshiyuki Sakemi¹, Hisao Makino^2,3, Yasushi Aoki¹, Tetsuya Yamamoto² (1.Sumitomo Heavy Industries, Ltd., 2.Research Inst., Kochi Univ., 3.Kochi Univ. Tech.)

Keywords:electronegative oxigen ions, plasma diagnostics, time-resolved Langmuir probe