2:15 PM - 2:45 PM
[7p-A502-2] Development of ultrafast capacitive humidity sensors for real-time sensing
Keywords:capacitive humidity sensor, carbon nanotube, hybrid material
We have developed printed capacitive humidity sensors with highly gas permeable carbon nanotube top electrodes using solution techniques. The also developed measurement system
consisting of a small measurement chamber, a computer-controlled high-speed solenoid valve, and a mass-flow controller enabled us to vary the ambient relative humidity within a few 10 ms. The hydrophobic, porous multiwalled carbon nanotube (MWCNT) network was suitable for gas permeation, and the response of the capacitive humidity. We obtained the ultrafast response-time (rise time) of 60 ms with thin polyimide and MWCNT composite electrodes and high sensitibity. The performance is suitable for use in high-speed humidity sensors to realize a real-time humidity andbreath-sensing measurement system. We will also talk about hybrid printable gas-sensors.
consisting of a small measurement chamber, a computer-controlled high-speed solenoid valve, and a mass-flow controller enabled us to vary the ambient relative humidity within a few 10 ms. The hydrophobic, porous multiwalled carbon nanotube (MWCNT) network was suitable for gas permeation, and the response of the capacitive humidity. We obtained the ultrafast response-time (rise time) of 60 ms with thin polyimide and MWCNT composite electrodes and high sensitibity. The performance is suitable for use in high-speed humidity sensors to realize a real-time humidity andbreath-sensing measurement system. We will also talk about hybrid printable gas-sensors.