[8a-PB3-1~8] 8.2 Plasma measurements and diagnostics

[8a-PB3-2] IR Absorption Spectroscopy of Deposition Reaction due to Hydrocarbon Plasmas

〇Masanori Shinohara¹, Takeshi Ihara¹, Yoshihito Yagyu¹, Tamiko Oshima¹, Hitoharu Kawasaki¹ (1.NIT Sasebo College)

Keywords:MIR-IRAS, hydrocarbon molecules, deposition process

We have investigated on depositon process due to hydrocarbon plasma such as methane (CH₄), accetylene (C₂H₂), ethylene (C₂H₄), benzene (C₆H₆), and so on, by using infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS). We hve also investigated on deposition process due to C₇H₁₆ plasma. We will discuss the difference of deposition processes due to different hydrocarbon molecules.