2022 Fall Meeting

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Oral presentation

II. Radiation, Accelerator, Beam and Medical Technologies » 203-2 Beam Application, Beam Measurement, Target

[1N01-04] Application of Quantum Beam

Wed. Sep 7, 2022 10:45 AM - 11:55 AM Room N (E2 Bildg.1F No.102)

Chair:Kai Masuda(QST)

11:00 AM - 11:15 AM

[1N02] Study on radiation-induced reaction mechanism of EUV resist containing Sn

*Yui Takata1, Yusa Muroya1, Takahiro Kozawa1, Satoshi Enomoto2, Bilal Naqvi3, Danilo De Simone3 (1. Osaka Univ. SANKEN, 2. Toyo Gosei, 3. imec)

Keywords:radiation chemistry, EUV resist, organotin compound, pulse radiolysis, gamma radiolysis

The reaction mechanisms of EUV resists containing Sn were analyzed by electron beam pulse radiolysis and gamma radiolysis to reveal radiation-induced mechanisms and to gain guidelines for EUV resist polymer.