CLEO-PR2022/ISOM'22/ODF'22

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Oral Session

CLEO-PR2022 » Micro/Nano Optical Sensors

[CThA17D] Micro/Nano Optical Sensors

Thu. Aug 4, 2022 11:00 AM - 12:00 PM Room 104&105 (1F)

Session Chairs: Keiichiro Kagawa (Shizuoka Univ.), Norimichi Tsumura (Chiba Univ.)

11:00 AM - 11:15 AM

[CThA17D-01] A design of high NA reflectie objective for DUV micro-spectroscopy

*Hikaru Takehara1, Keiji Sasaki1, Atsushi Taguchi1 (1. Hokkaido Univ. (Japan))

[Presentation Style] Onsite

Reflective objective is widely used for DUV micro-spectroscopy, however, the NA of reflective objective is limited typically up to 0.6. We designed DUV reflective objective with NA as high as 1.30 using glycerin as immersion.