[CThP6E] Comb Metrology III

[CThP6E-02] Investigation of the effect of grating profile on the precision of 2D single-shot comb-based interferometer

*Bao Thai Dinh¹, Chiba Keishi¹, Tuan Cong Truong², Shioda Tatsutoshi¹ (1. Saitama Univerisity (Japan), 2. Ha Noi Univerisity of Science and Technology (Viet Nam))

[Presentation Style] Onsite

The research theoretically analyzes the system specifications and designs the experiment to verify the effect of the discrete profile of the grating on the profilometry precision of the novel 2D single-shot comb-based interferometer.