[OThA4A] New Technologies I

[OThA4A-03] Stereophonic Lithography Using a Parabolic Mirror Projection System and One-sided Illumination

*Toshiyuki Horiuchi¹, Jun-ya Iwasaki¹, Hiroshi Kobayashi¹ (1. Tokyo Denki University (Japan))

[Presentation Style] Onsite

Stereophonic projection lithography using parabolic mirrors was examined. To extend the patterned area, one-sided illumination was investigated, and improved patterning performances were demonstrated. In addition, subjects to be studied further were also shown and discussed.