[P-CM11] C11. Semiconductor and Integrated Optical Devices

[P-CM11-03] A New Method for Measuring AlGaO_x Oxidation Width of Circular Defect in 2D Photonic Crystal (CirD) Laser

*Rubing Zuo¹, Shunsuke Miyazaki¹, Ryosei Kinoshita¹, Hanqiao Ye¹, Masaya Morita¹, Kenta Kaichi¹, Masato Morifuji¹, Hirotake Kajii¹, Akihiro Maruta¹, Masahiko Kondow¹ (1. Osaka Univ. (Japan))

[Presentation Style] Onsite

To develop the CirD laser, which will be used in intra-chip optical interconnects, we investigate a new method to measure the oxidation width of AlGaOx precisely so that we can obtain the most appropriate Q factor.