[P-CTh6] C6. Optical and Photonic Metrology

[P-CTh6-16] Broadband UV Confocal Spectroscopy and its Applications

Guo-Hao Lu¹, Chao-Feng Liu¹, *Chun-Jen Weng¹ (1. Taiwan Instrument Research Institute, NARLabs, Taiwan (Taiwan))

[Presentation Style] Online

This paper reports on the integration of a broadband light source with reflective optics to enable broadband UV confocal spectroscopy across a bandwidth of 250 nm to 1100 nm.