Heterogeneous Epitaxy and Integration

[TH-B1-02] Gas-Source Molecular Beam Epitaxy of GaInAsP-Based Multi Quantum Wells on InP-SiO₂/Si Substrates

〇Olivier Delorme¹, Claire Besancon¹, Fabrizio Riminucci¹, Frank Fournel², Valentin Ramez², Loïc Sanchez², Jean Decobert¹, Arnaud Wilk¹ (1. III-V Lab (France), 2. Univ. Grenoble Alpes, CEA, Leti (France))