ICSCRM2019

講演情報

印刷

Oral Presentation

Growth and Wafer Manufacturing

[Fr-2B] Wafer Manufacturing

2019年10月4日(金) 10:30 〜 11:45 Annex Hall 2 (Kyoto International Conference Center)

11:15 〜 11:30

[Fr-2B-03] Slurryless electrochemical mechanical polishing of 4H-SiC (0001) surfaces

*Xu Yang1, Xiaozhe Yang1, Kentaro Kawai1, Kenta Arima1, Kazuya Yamamura1 (1. Osaka University(Japan))