[Mo-2A] Oxidation and Nitridation

[Mo-2A-03] Impact of substrate orientation on the structure of SiO₂/SiC interface

*Xiuyan Li^1,2, Mengjun Li², Tianning Cui¹, Sang Soo Lee³, Sylvie Rangan², Alexi Aermakov², Timothy T. Fister³, Torgny Gustfsson², Eric Garfunkel², Paul Fenter³, Leonard C. feldman² (1. Shanghai Jiao Tong Univ.(China), 2. Rutgers Univ.(United States of America), 3. Argonne National Lab.(United States of America))