ICSCRM2019

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Oral Presentation

Growth and Wafer Manufacturing

[Tu-2B] Sublimation Bulk Growth

Tue. Oct 1, 2019 10:45 AM - 12:30 PM Annex Hall 2 (Kyoto International Conference Center)

11:30 AM - 11:45 AM

[Tu-2B-03] Growth and Characterization of Al-Doped p-type 4H-SiC Grown by PVT

*Kazuma Eto1, Hiromasa Suo1,2, Tomohisa Kato1, Hajime Okumura1 (1. National Institute of Advanced Industrial Science and Technology (AIST)(Japan), 2. Showa Denko K. K.(Japan))