[We-3B] Fundamental Physics and Measurement Techniques

[We-3B-05] Depth Profiles of Deep Levels Generated by ICP-RIE in 4H-SiC

*Kazutaka Kanegae¹, Takafumi Okuda¹, Masahiro Horita^1,2, Jun Suda^1,2, Tsunenobu Kimoto¹ (1. Kyoto Univ.(Japan), 2. Nagoya Univ.(Japan))