[Wed-D1] Non-Evaporable Getter Coating

[Wed-D1-5] Award Applied
Prototype Turbo-Molecular Pump of high-strength material

*Nang Tin Tin Htwe¹, Takahiro Uehara¹, Takuya Mabuchi¹, Mitsuru Sakurai¹, Junichiro Kamiya², Kaoru Wada² (1. Osaka Vacuum Ltd (Japan), 2. Japan Atomic Energy Agency (Japan))

キーワード：Turbo-molecular pump , Outgassing, Synchrotron, Improvement of pumping performance, Titanium alloy rotor , Strength of the rotor material, Additive manufacturing