Production Method of ClF3 Resistant Film

Presentation information

Oral presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

Tue. Sep 17, 2013 1:30 PM - 6:00 PM B3 (TC2 1F-105)

4:15 PM - 4:30 PM

^○Hitomi Matsuda¹, Hitoshi Habuka¹, Yuki Ishida², Toshiyuki Ohno² (Yokohama Nat. Univ.¹, FUPET²)

Keywords:ClF3