The 74th JSAP Autumn Meeting,2013

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[17p-D1-1~18] 6.2 Carbon-based thin films

Tue. Sep 17, 2013 1:30 PM - 6:45 PM D1 (MK 1F-101)

1:45 PM - 2:00 PM

[17p-D1-2] Tetrahedral amorphous carbon with very small amount of hydrogen

○Hiroshi Inaba1, Toru Matsumura1, Hiroyuki Matsumoto1 (HGST Japan Research Lab.1)

Keywords:FCVA,ta-C,DLC