9:30 AM - 11:30 AM
[19a-P2-6] Ta2O5 optical waveguide on silica substrate fabricated by CF4 reactive ion etching
Keywords:光導波路,五酸化タンタル
Poster presentation
05. Optoelectronics » 5 Optoelectronics(poster)
Thu. Sep 19, 2013 9:30 AM - 11:30 AM P2 (Davis Memorial Auditorium)
9:30 AM - 11:30 AM
Keywords:光導波路,五酸化タンタル